Abstract: MEMS gyroscopes are widely used in the underwater vehicles by their excellent performance and affordable costs. However, sensors' changes in temperature seriously affect measurements' accuracy. Therefore, it is meaningflll to accurately identify the temperature compensation model. This paper firstly uses the calibration algorithm based on the Persistent Excitation Signal Criterion to obtain calibration parameters, then use tile Thin plate spline interpolation method to establish MEMS gyro temperature compensation model. The effectiveness of the proposed algorithm have been demonstrated through comparative experiment.